Chemical-Mechanical Polishing of Low Dielectric Constant Polymers and Organosilicate Glasses: Fundamental Mechanisms And Application To Ic Interconnect Technology
by Christopher Lyle Borst,William N. Gill,Ronald J. Gutmann
ISBN 13: 9781461354246
Format: Paperback (248 pages) Publisher: Springer Published: 23 Feb 2014
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Chemical-Mechanical Polishing of Low Dielectric Constant Polymers and Organosilicate Glasses: Fundamental Mechanisms and Application to IC Interconnect Technology
ISBN 13: 9781402071935
Format: Illustrated (252 pages) Publisher: Springer Published: 30 Sep 2002